Corrosion resistance of the vacuum arc deposited Ti, TiN and TiO2 coatingson large area glass substrates

An industrial installation for vacuum are deposition is presented. Tts pote ntial in the field of decorative coatings for large area glass sheets is de monstrated, In particular it is possible to deposit patterned coatings thro ugh a polymeric textile mask. The ability to deposit uniform multilayer coa tings having interference colours onto large silicate glass sheets is shown . Titanium, titanium nitride and titanium dioxide coatings on silicate glas s have been characterized in terms of composition and corrosion resistance. Depth profiling was achieved with the aid of Auger electron spectroscopy. The corrosion resistance of TiN coatings is higher than that of TiO2. The c orrosion resistance of vacuum are deposited TiN coatings on glass was highe r than that of TIN coatings produced by direct current reactive sputtering and plasma assisted chemical vapour deposition. Mask-deposited TiN coatings do not show any signs of accelerated corrosion along the border between th e coated and uncoated glass. (C) 2000 Elsevier Science S.A. All rights rese rved.