T. Szorenyi et al., Chemical analysis of pulsed laser deposited a-CNx films by comparative infrared and X-ray photoelectron spectroscopies, SURF COAT, 125(1-3), 2000, pp. 308-312
Amorphous carbon nitride films are deposited at room temperature on silicon
substrates by ArF excimer laser (193 nm) ablation of a graphite target in
nitrogen atmosphere. By tuning the process parameters, fine control of the
carbon-carbon and carbon-nitrogen bond configuration is achieved in a broad
range as followed by X-ray photoelectron spectroscopy (XPS) and infrared (
IR) absorption spectroscopy. Based on the comparative and quantitative anal
ysis of changes in measured IR versus XPS spectra as a function of reactive
gas pressure, laser fluence and target-to-substrate distance, and on a cri
tical review of the existing interpretation of IR data, an assignment of th
e components of the broad band extending from 900 to 1900 cm(-1) in the IR
spectra to specific carbon-carbon and carbon-nitrogen bond configurations i
s proposed. (C) 2000 Elsevier Science S.A. All rights reserved.