The wide-scale inspection of extended technical components with respect to
typical surface features (shape, texture, roughness) needs the combined app
lication of different measurement techniques together with new tools for th
e consistent analysis and description of the measuring results. The new con
cept of scaled topometry meets the demands of wide-scale surface topometry
Controlled by the evaluation of scale-independent surface features based on
fractal geometry, different measurement techniques with subsequent lateral
and depth resolution are applied. As a result a complete description of th
e surface is given taking into account special regions of interest. The cho
ice and the orientation of the special measurement technique is supported b
y a new feature extraction method based upon the principle of the fractal p
yramid. The advantages of the new concept are demonstrated on the example o
f a ceramic plate with surface faults.