Measurement and description of microstructures with consideration of material-specific characteristics

Citation
Hj. Tiziani et al., Measurement and description of microstructures with consideration of material-specific characteristics, TEC MES, 66(11), 1999, pp. 429-436
Citations number
14
Categorie Soggetti
Instrumentation & Measurement
Journal title
TECHNISCHES MESSEN
ISSN journal
01718096 → ACNP
Volume
66
Issue
11
Year of publication
1999
Pages
429 - 436
Database
ISI
SICI code
0171-8096(199911)66:11<429:MADOMW>2.0.ZU;2-N
Abstract
Optical measurement techniques offer a high data acquisition rate, a non-co ntact mode, and a high resolution. But there are often large differencies i n the results obtained by optical and tactile sensors if rough surfaces are investigated. In this paper we demonstrate that confocal microscopy and wh ite-light interferometry offer high resolution measurements on engineering surfaces and we show that the results are comparable to standard tactile se nsors. The sensors are presented as well as results obtained on engineering surfaces. Material aspects are analysed by additional ellipsometric measur ements.