High resolution topometry in conjunction with macro structures

A variety of technical applications requires surface roughnesses to be meas ured and characterised over a wide range of scale. In order to meet these r equirements it is inevitable to combine different measurement techniques by using an assembled PSD (power spectral density). First of all, a good corr espondence of the profiles and PSDs of the AFM and WLI is shown by measurin g a binary grating. Then, rough and structured technical surfaces and some of their dynamic changes are measured by WLI, AFM, and scattered light meas urements and are combined by means of the PSD in a wide range of scale cove ring up to 5 orders of magnitude.