High-precision optical profilometry at surfaces with varying materials

Authors
Jennewein, H Ganz, T Gottschling, H Tschudi, T
Citation
H. Jennewein et al., High-precision optical profilometry at surfaces with varying materials, TEC MES, 66(11), 1999, pp. 447-454
Citations number
6
Categorie Soggetti
Instrumentation & Measurement
Journal title
TECHNISCHES MESSEN
ISSN journal
01718096 → ACNP
Volume
66
Issue
11
Year of publication
1999
Pages
447 - 454
Database
ISI
SICI code
0171-8096(199911)66:11<447:HOPASW>2.0.ZU;2-6
Abstract
Optical Profilometry using the principle of heterodyne interferometry in co mbination with microellipsometry enables the simultaneous profile measureme nt and material characterization with high lateral resolution. We combined these two methods to interferometric profilometry with high accuracy even a t probes consisting of laterally varying material.