Precise structure measurement using laser-based microellipsometry

We investigated ref lection-ellipsometric methods for high-resolution surfa ce measurement. The topography and the material distribution are determined simultaneously by combinative evaluation of the light polarization. Scanni ng the surface, the focused measurement beam of a novel PSA-ellipsometer (m icroellipsometer) delivers the local distributions of four ellipsometric pa rameters. They are used to calculate the local gradient angles and the comp lex material refraction index. We successfully carried out tests on various surfaces.