Synchrotron radiation photoelectron spectroscopy study of ITO surface

Authors
Lai, B Ding, XM Yuan, ZL Zhou, X Liao, LS Zhang, SK Yuan, S Hou, XY Lu, ED Xu, PS Zhang, XY
Citation
B. Lai et al., Synchrotron radiation photoelectron spectroscopy study of ITO surface, APPL SURF S, 157(1-2), 2000, pp. 35-38
Citations number
21
Categorie Soggetti
Apllied Physucs/Condensed Matter/Materiales Science","Material Science & Engineering
Journal title
APPLIED SURFACE SCIENCE
ISSN journal
01694332 → ACNP
Volume
157
Issue
1-2
Year of publication
2000
Pages
35 - 38
Database
ISI
SICI code
0169-4332(200003)157:1-2<35:SRPSSO>2.0.ZU;2-Q
Abstract
Synchrotron radiation photoelectron spectroscopy (SRPES) has been applied t o surface analysis of indium tin oxide (ITO) thin films. Several different components of In and Sn were observed at the clean ITO surface. By comparin g the chemical compositions of the film before and after vacuum annealing, the contents of In2O3-x and Sn3O4 were found to be the major factors influe ncing the electrical conductivity and optical transparency of the film. (C) 2000 Elsevier Science B.V. All rights reserved.