On the structural properties and optical transmittance of TiO2 r.f. sputtered thin films

Authors
Mardare, D Tasca, M Delibas, M Rusu, GI
Citation
D. Mardare et al., On the structural properties and optical transmittance of TiO2 r.f. sputtered thin films, APPL SURF S, 156(1-4), 2000, pp. 200-206
Citations number
10
Categorie Soggetti
Apllied Physucs/Condensed Matter/Materiales Science","Material Science & Engineering
Journal title
APPLIED SURFACE SCIENCE
ISSN journal
01694332 → ACNP
Volume
156
Issue
1-4
Year of publication
2000
Pages
200 - 206
Database
ISI
SICI code
0169-4332(200002)156:1-4<200:OTSPAO>2.0.ZU;2-K
Abstract
Pure and doped TiO2 thin films were obtained by r.f. sputtering method. The samples were deposited onto glass and glass covered with indium tin oxide (ITO) substrates. Phase and surface morphology were investigated using X-ra y diffraction (XRD) and scanning electron microscopy (SEM). The structure o f TiO2 thin films is influenced by the substrate used and also by doping wi th Ce, Nb and Fe impurities. Consequently, the transmittance will also be m odified. (C) 2000 Elsevier Science B.V. All rights reserved.