Citation
A. Braun et al., The influence of ambient temperature on KrF laser ablation of polyimide inair, APPL SURF S, 154, 2000, pp. 73-77
Citations number
16
Categorie Soggetti
Apllied Physucs/Condensed Matter/Materiales Science","Material Science & Engineering
Journal title
APPLIED SURFACE SCIENCE
ISSN journal
01694332
→ ACNP
Volume
154
Year of publication
2000
Pages
73 - 77
Database
ISI
SICI code
0169-4332(200002)154:<73:TIOATO>2.0.ZU;2-L
Abstract
The ablation rate of polyimide in air in the temperature range of 25 degree
s C to 200 degrees C is investigated with a 20 ns KrF excimer laser. The ab
lation rates for laser fluences between 60 and 2750 mJ/cm(2) show a decline
vs. increasing temperature. Using Beer's law of absorption, a fitting form
ula is found containing an empirical linear correction term which decreases
with increasing substrate and ambient temperature. The optical properties
of polyimide at elevated temperatures are considered also. (C) 2000 Elsevie
r Science B.V. All rights reserved.