J. Lappalainen et V. Lantto, Composition and phase structure in laser deposited and post-annealed Pb1-3y/2Ndy(ZrxTi1-x)O-3 thin films, APPL SURF S, 154, 2000, pp. 118-122
Pulsed XeCl excimer laser with a wavelength of 308 nm was used to ablate a
Nd-modified lead-zirconate-titanate (PNZT), Pb1-3y/2 Nd-y(ZrxTi1-x)O-3, cer
amic target with y = 0.02 and x = 0.55 (Pb0.97Nd0.02(Zr0.55Ti0.55)O-3) With
various laser-beam fluences between 0.2 and 3.0 J/cm(2). The target compos
ition was near the morphotropic phase boundary (MPB) with a relative atomic
Zr-content of B-site cations (Zr/(Zr + Ti)) x approximate to 0.53 between
the ferroelectric tetragonal and high-temperature rhombohedral phases of PZ
Ts at room temperature. The films were deposited on single-crystal sapphire
(Al2O3(<1(1)over bar 02>)) and MgO(100) substrates without substrate heati
ng. The phase structure and composition of both as-grown and post-annealed
films were studied with X-ray diffraction measurements together with scanni
ng electron microscopy (SEM) and energy dispersive spectroscopy of X-rays (
EDS). The as-grown PNZT thin films after deposition were amorphous and crys
tallized during post-annealing in different phase structures depending on t
he ablation process conditions. The relative atomic zirconium content, Zr/(
Zr + Ti), of the films depends on the laser-beam fluence used in the ablati
on, but is insensitive to post-annealing conditions. (C) 2000 Elsevier Scie
nce B.V. All rights reserved.