Ambient gas effects during the growth of lithium niobate films by pulsed laser deposition

The density of Li atoms in the plume generated by laser ablation of LiNbO3 has been studied using optical absorption spectroscopy in different environ ments (vacuum, Ar, O-2 and N2O). The results show that the density of Li at oms in the plume decreases when ablation takes place in a N2O environment. The analysis of the structure and composition of films grown under the cons idered environments shows that: (i) the Li content of the films remains app roximately constant in all cases, (ii) the oxygen content for films grown i n an oxidant environment (O-2 and N2O) increases, and (iii) the formation o f niobium nitride is observed in a N2O environment. The results are discuss ed in terms of possible chemical reactions occurring in the plume in the pr esence of the considered gases, (C) 2000 Elsevier Science B.V. All rights r eserved.