Fabrication and characterization of diamond-like carbon thin films by pulsed laser deposition

Diamond-like carbon (DLC) thin films have shown advantageous field emission properties due to a negative electron affinity (NEA) and low work function . The experiment was performed at substrate temperature in the range of roo m temperature to 600 degrees C. The laser energy density used was in the ra nge 6-20 J/cm(2), SEM, Raman, photoluminescence (PL), XPS and I-V measureme nt were used to investigate the microstructure and the field emission prope rties of DLC thin films. Deposition parameters, such as laser energy densit y and substrate temperature were optimized for the application of field emi ssion proper-ties. Good field emission properties were obtained with E-th = 5.03 V/mu m at 300 degrees C and 12 J/cm(2). (C) 2000 Elsevier Science B.V . All rights reserved.