Pre-bonding technology based on excimer laser surface treatment

Citation
M. Rotel et al., Pre-bonding technology based on excimer laser surface treatment, APPL SURF S, 154, 2000, pp. 610-616
Citations number
12
Categorie Soggetti
Apllied Physucs/Condensed Matter/Materiales Science","Material Science & Engineering
Journal title
APPLIED SURFACE SCIENCE
ISSN journal
01694332 → ACNP
Volume
154
Year of publication
2000
Pages
610 - 616
Database
ISI
SICI code
0169-4332(200002)154:<610:PTBOEL>2.0.ZU;2-P
Abstract
The application of ArF excimer laser for surface pre-treatment of polycarbo nate, polyetherimide, polyaryl ether-ether-ketone (PEEK) composite, fibergl ass, aluminum, copper and fused silica was investigated. Various substrates were tested with excimer laser irradiation using various parameters, such as intensity, repetition rate, and number of pulses. The optimal laser trea tment parameters were found for each material needed for achieving maximum adhesional strength of the corresponding bonded joints. Experimental result s indicated that UV laser surface treatment improved significantly the adhe sion strength compared to conventional treated substrates for all the mater ials tested. The improved adhesion was correlated with the roughening of th e irradiated surface, chemical modification and removal of contamination. ( C) 2000 Elsevier Science B.V. All rights reserved.