Characterization of (Ti1-xAlx)N films prepared by radio frequency reactivemagnetron sputtering

(Ti1-xAlx)N films were deposited by radio frequency reactive magnetron sput tering on a high speed steel substrate. The structure and composition of th e coatings were analysed by various techniques. Hardness and adhesion of th e films were investigated using Vickers micro-indentation and scratch test respectively, whereas their tribological properties were studied using a pi n-on-disk tribometer. The results show that increasing aluminium content le ads to increase hardness of the films and to decrease their wear resistance when sliding against a magnesia-stabilized zirconia ball. On the contrary, no clear dependence of the film adhesion on the aluminium concentration wa s detected. (C) 2000 Elsevier Science Ltd. All rights reserved.