Characterisation of zirconium nitride coatings prepared by DC magnetron sputtering

Authors
Ramana, JV Kumar, S David, C Ray, AK Raju, VS
Citation
Jv. Ramana et al., Characterisation of zirconium nitride coatings prepared by DC magnetron sputtering, MATER LETT, 43(1-2), 2000, pp. 73-76
Citations number
16
Categorie Soggetti
Apllied Physucs/Condensed Matter/Materiales Science","Material Science & Engineering
Journal title
MATERIALS LETTERS
ISSN journal
0167577X → ACNP
Volume
43
Issue
1-2
Year of publication
2000
Pages
73 - 76
Database
ISI
SICI code
0167-577X(200003)43:1-2<73:COZNCP>2.0.ZU;2-K
Abstract
The composition, thickness and microhardness of zirconium nitride (ZrN) coa tings deposited at different nitrogen partial pressures using DC magnetron sputtering technique have been studied. Proton elastic backscattering techn ique involving the N-14(p,p)N-14 reaction has been utilised for the determi nation of composition and thickness of these coatings. (C) 2000 Elsevier Sc ience B.V. All rights reserved.