In this paper, we present a cinematographic measuring technique for visuali
zation and characterization of dynamics in micro electro mechanical systems
for the example of a thermal ink jet printhead. Furthermore, we derive a m
odel for identification and simulation of dynamic phenomena in the thermal
pneumatic microactuator of a thermal ink jet. Using this model we calculate
the pressure propagation in the bubble by identifying the mathematical mod
el with position measurements extracted from cinematographic image sequence
s which have been taken with our visualization equipment. The identificatio
n of the model was performed with minimizing the sum of quadratic deviation
s between simulated and measured values. Parameter studies with the identif
ied model predict the behavior of the microactuator at outer pressures high
er than 1 bar. (C) 1999 ACRS. Published by Elsevier Science Ltd. All rights
reserved.