Cu/Ti/Cu heterostructures have been in situ deposited on the 7x7 reconstruc
ted Si(111) surface. A number of complementary techniques, such as in situ
low-energy, medium-energy and Kikuchi electron diffraction and ex situ N-ra
y diffraction, were used in order to characterise the growth process and th
e structural properties of the films. It is found that the growth mode of m
etallic films is characterised by the presence of twinned islands induced b
y the 7 x 7 reconstruction of the Si(111) substrate. This work can stimulat
e further application of the metal-metal epitaxy on silicon to grow high qu
ality ultrathin magnetic films to be integrated in microelectronic devices.
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