Generation of homogeneous plasma in a low-pressure glow discharge

The possibility of producing homogeneous plasma in a low-pressure discharge with the use of a hollow anode or hollow cathode is analyzed. It is shown that, in contrast to the high-pressure discharge, where uniform ionization is needed to produce homogeneous plasma, in the low-pressure discharge, nea rly uniform radial distribution of the plasma parameters can be achieved un der nonuniform ionization conditions by increasing the ionization probabili ty at the system periphery and reducing it near the system axis. It is show n that the magnetic field can facilitate generation of the homogeneous plas ma instead of interfering with it. (C) 2000 MAIK "Nauka/Interperiodica".