Investigation of an ion source intended for beam technologies

Citation
Lp. Veresov et al., Investigation of an ion source intended for beam technologies, TECH PHYS, 45(4), 2000, pp. 490-496
Citations number
2
Categorie Soggetti
Apllied Physucs/Condensed Matter/Materiales Science
Journal title
TECHNICAL PHYSICS
ISSN journal
10637842 → ACNP
Volume
45
Issue
4
Year of publication
2000
Pages
490 - 496
Database
ISI
SICI code
1063-7842(2000)45:4<490:IOAISI>2.0.ZU;2-C
Abstract
An ion source with a cold cathode is described, which generates ion beams o f various gases and solids of circular cross sections for technological pur poses. (C) 2000 MAIK "Nauka/Interperiodica".