Surface modification of boron nitride in hydrogen plasma

The state of the surface of poorly crystallized or amorphous (a-BN) and hig hly oriented hexagonal (h-BN) boron nitride before and after treatment in a hydrogen plasma has been studied by high-resolution Auger electron spectro scopy. Treatment of both modifications of BN in hydrogen plasma is found to lead to a partial transformation of sp(2) bonds into sp(3) bonds on the su rface. This is thought to be a result of terminating dangling bonds of sp(2 )-hybridized BN by hydrogen atoms. The formation of chemical N-H bonds afte r treatment of BN in hydrogen plasma is found on the surface of both a-BN a nd h-BN, whereas in practice, B-H bonds appear to form only on the treated surface of h-BN. (C) 2000 Elsevier Science B.V. All rights reserved.