Microwave absorption in electron cyclotron resonance plasma

The microwave power absorption in electron cyclotron resonance plasma react or was investigated with a two-dimensional hybrid-code. Simulation results indicated that there are two typical power deposition peaks on the axis and decreases in radial direction, (2) microwave power deposition has its maxi mum at some radial position, i.e., a hollow distribution. The spatial distr ibution of electron temperature resembles always to the microwave power abs orption profile. The dependence of plasma parameter on the gas pressure is discussed also.