A comparative Raman spectroscopy study on silicon surface in HF, HF/H2O2 and HF/NH4F aqueous solutions

The nature of Si(100) surfaces during immersion in dilute hydrofluoric acid s (DHF), HF/H2O/H2O mixture and buffered hydrofluoric acids (BHF) has been comparatively investigated using confocal Raman spectroscopy. In DHF soluti on, silicon surfaces are covered mainly with silicon trihydrides (Si-H-3) a t the beginning of etching. As the etching goes on, silicon dihydrides (Si- H-2) become main surface bonds, and silicon monohydride (Si-H) signal appea rs clearly. In HF/H2O2/H2O solution, silicon surfaces are terminated with h ydrides, oxides and hydrogen-associated silicon fluorides. In BHF solution, silicon surfaces are covered with hydrides and hydrogen-associated silicon fluorides. (C) 2000 Elsevier Science S.A. All rights reserved.