Characterization of surface topography by confocal microscopy: I. Principles and the measurement system

Surface topography and, in particular, roughness and form, plays an importa nt role in determining the functional performance of engineering parts. The measurement and understanding of surface topography is rapidly attracting the attention of the physicist, the biologist and the chemist as well as th e engineer. Optics in general played an important role in measurement and, with the advent of opto-mechatronics, it is once again at the forefront of measurement. In this paper, the principles and performance of a confocal mi croscope, together with the measurement system, are described. Suitable fix tures are developed and integrated with the computer system for generating three-dimensional surface and form data. Software for data acquisition, ana lysis of various parameters including new parameters and visualization of s urface geometrical features has been developed. Both the intensity and the auto-focus methods are used to measure two-dimensional surface roughness by use of the system and results are presented. The measurement and character ization of three-dimensional surface topography and form error will be pres ented in part II of this paper.