We present in this paper, for the first time, the extension of the ion beam
analysis DataFurnace to the analysis of non-resonant nuclear reaction anal
ysis (NRA) data. The NRA routine is general and can be used to analyse data
from any reaction with known Q and cross section. The shape of the cross s
ection is taken into account and hence depth profiling using reactions with
non-flat cross sections is easily done. We show different applications of
the program, including profiling of deuterium with a He-3 beam and profilin
g of N in a stainless steel matrix using a deuterium beam. In the latter ca
se, we also performed 35 MeV Cl-ERDA and D-RBS experiments of the same samp
le. The Ion Beam Analysis DataFurnace allows to analyse all the data simult
aneously, taking into account all the information present in the different
data sets in a fully consistent manner. (C) 2000 Published by Elsevier Scie
nce B.V. All rights reserved.