Analysis of defects in multicomponent crystals by ion channeling

Citation
A. Stonert et al., Analysis of defects in multicomponent crystals by ion channeling, NUCL INST B, 161, 2000, pp. 496-500
Citations number
12
Categorie Soggetti
Spectroscopy /Instrumentation/Analytical Sciences","Instrumentation & Measurement
Journal title
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS
ISSN journal
0168583X → ACNP
Volume
161
Year of publication
2000
Pages
496 - 500
Database
ISI
SICI code
0168-583X(200003)161:<496:AODIMC>2.0.ZU;2-V
Abstract
Ion channeling is a rapid method of analysis of crystal damage. The ''two-b eam approximation" method is typically used for defect profiles evaluation in single crystals. Another method is based on the evaluation of RBS/channe Iing spectra by Monte Carlo (MC) simulation. Tn most cases, the channeling spectra can be well reproduced by MC simulations under the assumption that the defects are essentially randomly displaced atoms. The criteria for vali dity of such an approach are given. In addition, the problem of stopping po wer of the channeled beam in damaged crystals is discussed. (C) 2000 Elsevi er Science B.V. All rights reserved.