Lattice sites of diffused gold and platinum in epitaxial ZnSe layers

The lattice location of diffused gold and platinum in zinc selenide (ZnSe) epitaxial layers was studied using the Rutherford backscattering (RBS) chan neling technique. Thin Au and Pt films were evaporated onto ZnSe samples. T he Au/ZnSe samples were annealed at 525 degrees C and the residual Au film was removed by etching. Channeling angular scan measurements showed that ab out 30% of Au atoms were close to substitutional site (displaced about 0.2 Angstrom). In the case of the Pt/ZnSe samples the annealing temperatures ra nged from 600 degrees C to 800 degrees C. The Pt minimum yields along (1 0 0) direction were close to the random value, varying from 80% to 90%. The m easured Pt angular scans along (1 0 0) and (1 1 0) directions indicated a r andom location. (C) 2000 Elsevier Science B.V. All rights reserved.