Characterization of optical UV filters using Rutherford backscattering spectroscopy

Rutherford backscattering spectroscopy (RBS) has been used during the devel opment of multilayer thin film optical filters, especially designed for the fluorescence detector of the Pierre AUGER Project. Depth profiles of the h eavy components have been measured directly, while reliable results for the light components could also be extracted indirectly. Relative thickness an d density of the individual layers and deviations from the desired thicknes s and stoichiometry have been deduced. The findings of the RES method have been compared and discussed with results obtained by other characterization techniques. (C) 2000 Elsevier Science B.V. All rights reserved.Rutherford backscattering spectroscopy (RBS) has been used during the development of m ultilayer thin film optical filters, especially designed for the fluorescen ce detector of the Pierre AUGER Project. Depth profiles of the heavy compon ents have been measured directly, while reliable results for the light comp onents could also be extracted indirectly. Relative thickness and density o f the individual layers and deviations from the desired thickness and stoic hiometry have been deduced. The findings of the RES method have been compar ed and discussed with results obtained by other characterization techniques . (C) 2000 Elsevier Science B.V. All rights reserved.