Ion nitriding of aluminium - experimental investigation of the thermal transport

To study the thermal transport during the ion nitriding, pure polycrystalli ne Al has been subsequently implanted with N-14 and N-15. The implantations have been performed by a broad beam ion source with an energy of 1 keV, a current density of 1 mA/cm(2) and a temperature of 500 degrees C which allo ws fast diffusion. The oxygen partial pressure was below 3 x 10(-5) Pa thro ughout the treatment. The samples were analysed by X-ray diffraction at gra zing incidence. The depth profiles of the isotopes were obtained by nuclear reaction analysis (NRA). The measurements reveal the formation of a hexago nal AlN-phase and show that the pre-implanted isotope is found only in the bulk, while the post-implanted isotope is located near the surface. The the rmal transport is discussed on the basis of the experimental results. (C) 2 000 Elsevier Science B.V. All rights reserved.