Degradation of polyimide and polyethyleneterephtalate irradiated with 150 and 200 keV Ar+ ions, studied by RBS and ERD techniques

Authors
Hnatowicz, V Perina, V Havranek, V Vosecek, V Novotny, J Vacik, J Svorcik, V Rybka, V Kluge, A
Citation
V. Hnatowicz et al., Degradation of polyimide and polyethyleneterephtalate irradiated with 150 and 200 keV Ar+ ions, studied by RBS and ERD techniques, NUCL INST B, 161, 2000, pp. 1099-1103
Citations number
12
Categorie Soggetti
Spectroscopy /Instrumentation/Analytical Sciences","Instrumentation & Measurement
Journal title
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS
ISSN journal
0168583X → ACNP
Volume
161
Year of publication
2000
Pages
1099 - 1103
Database
ISI
SICI code
0168-583X(200003)161:<1099:DOPAPI>2.0.ZU;2-R
Abstract
Polyimide (Upilex, PI) and polyethyleneterephtalate (Mylar, PET) were irrad iated with 200 and 150 keV Ar+ ions respectively to different fluences and the depth profiles of hydrogen and oxygen atoms in polymer surface layer we re determined using standard Rutherford backscattering (RBS) and elastic re coil detection (ERD) techniques. Significant hydrogen and oxygen depletion is observed at the ion fluences above 1 x 10(14) cm(-2). Above 5 x 10(15) c m(-2) a saturated state is achieved when another fluence increase does not result in significant changes of the H and O profile shape. At higher fluen ces the H and O depth profiles are rather flat with no local minima. This f inding indicates only minor role of nuclear stopping in production of volat ile degradation products. (C) 2000 Elsevier Science B.V. All rights reserve d.