The ECR ion source is designed for the production of high-current ion beams
of various gaseous elements. The ion source consists of a cylindrical disc
harge chamber, solenoidal coils for generation of the magnetic field along
the chamber axis. three electrode accel-decel ion extraction system and a m
icrowave power supply system. Beams of oxygen, nitrogen and hydrogen ions w
ith a current up to 75 mA have been produced. The atomic ion content of the
beam exceeds 70%. (C) 2000 Published by Elsevier Science B.V. All rights r
eserved.