Diffusion model of the gaseous microwave discharge in a magnetic field with a constant nonzero boundary condition on the walls of a plasma generator

Authors
Gulyaev, YV Cherkasov, ID Yafarov, RK
Citation
Yv. Gulyaev et al., Diffusion model of the gaseous microwave discharge in a magnetic field with a constant nonzero boundary condition on the walls of a plasma generator, J COMMUN T, 44(4), 1999, pp. 437-441
Citations number
4
Categorie Soggetti
Information Tecnology & Communication Systems
Journal title
JOURNAL OF COMMUNICATIONS TECHNOLOGY AND ELECTRONICS
ISSN journal
10642269 → ACNP
Volume
44
Issue
4
Year of publication
1999
Pages
437 - 441
Database
ISI
SICI code
1064-2269(199904)44:4<437:DMOTGM>2.0.ZU;2-U
Abstract
The diffusion model of the stationary gaseous microwave discharge in a magn etic field is elaborated that takes into account the simultaneous longitudi nal-transverse input of energy to a circular reactor. For three different c onfigurations of the ionization sources, the comparative analysis of the un iformity and intensity of the vacuum-plasma micro-processing of objects wit h a large cross section is performed.