Piezoelectrically actuated suspension for hard disk drives

This paper presents a new piezoelectrically actuated suspension design with two parallel microactuators placed in between the baseplate and the spring beam. Each microactuator consists of two piezoelectric plates sandwiched b y a meander-line spring. Two important design issues, namely the stroke cap ability and the suspension dynamics, are addressed in detail. Design parame ters that affect the stroke capability and the resonance of the actuated su spension are identified and modeled. The results show that our design has m et the stroke and resonance requirements and can be used to support high tr ack per inch (TPI) hard disk drive servo systems.