Fabrication of meander and spiral type micro inductors

To obtain microstructure of magnetic devices, the thin film inductors were fabricated by the process such as thin film manufacturing, photolithography and wet etching. The frequency characteristics of these devices are measur ed at high frequency range. When the inductor sizes of the spiral and the m eander type are same, the inductance and the quality factor of the spiral t ype inductor are larger than those of the meander type inductor, but the dr iving frequency of the spiral type inductor is fewer than that of the meand er type inductor.