Synthesis of In2S3 nanolayers on the silica surface by ionic layer deposition

The effects of the concentration and pH of reagent solutions and the number of ionic layer deposition cycles on the kinetics of the growth of In2S3 na nolayers were studied. The conditions for the nanolayer synthesis on the su rface by ionic layer deposition as a result of a reaction between sorbed io ns in the layer were determined. The composition of the synthesized layers was determined by UV and IR Fourier spectroscopy, X-ray spectral microanaly sis, and X-ray photoelectron spectroscopy. The thickness of the layers was determined by ellipsometry. The thickness of In2S3 layers is predetermined by the number of ionic layer deposition cycles with an accuracy of nanomete r fractions.