Thickness dependence of elastic modulus and hardness of on-wafer low-k ultrathin polytetrafluoroethylene films

Authors
Wang, J Shi, FG Nieh, TG Zhao, B Brongo, MR Qu, S Rosenmayer, T
Citation
J. Wang et al., Thickness dependence of elastic modulus and hardness of on-wafer low-k ultrathin polytetrafluoroethylene films, SCR MATER, 42(7), 2000, pp. 687-694
Citations number
36
Categorie Soggetti
Apllied Physucs/Condensed Matter/Materiales Science",Metallurgy
Journal title
SCRIPTA MATERIALIA
ISSN journal
13596462 → ACNP
Volume
42
Issue
7
Year of publication
2000
Pages
687 - 694
Database
ISI
SICI code
1359-6462(20000317)42:7<687:TDOEMA>2.0.ZU;2-0