Behavior of the sputtered copper atoms, ions and excited species in a radio-frequency and direct current glow discharge

The behavior of the sputtered copper atoms and ions, both in the ground sta te and in excited levels, is modeled with a collisional-radiative model and two Monte Carlo models. The models are applied to a glow discharge operate d in either the direct current (dc) or the radio-frequency (rf) mode, at si milar conditions of gas pressure and electrical power (i.e. 5 torr and appr ox. 38 W). Typical results of the model are the level populations of all co pper atomic and ionic levels, the relative contributions of various populat ing and depopulating processes, as well as the optical emission intensities of copper atomic and ionic lines. These results will be presented and comp ared for both operation modes. (C) 2000 Elsevier Science B.V. All rights re served.