The intensity of the Auger emission from ultrathin (< 2 monolayers) overlay
ers excited by energetic (1-5 keV) electron beams, shows an unusually large
anisotropy as a function of the incidence angle. We proposed a multistep m
echanism which accounts for this anisotropy, based on the electron focusing
and backscattering of the beam electrons from the bulk atoms. The intensit
y and anisotropy of the backscattered electrons has been measured in a larg
e energy interval and its relationship with the structure and the Auger emi
ssion from the surface layer is discussed.