R. Reibel et al., A kinetic model for the removal of sulfur from polycrystalline titanium surfaces exposed to oxygen, SURF REV L, 6(5), 1999, pp. 935-940
Recent studies using Auger Electron Spectroscopy (AES) on polycrystalline t
itanium surfaces led to the discovery of a temperature-dependent phenomenon
for the removal of sulfur using oxygen exposures. It was seen that at temp
eratures greater than 200 degrees C and pressures lower than 10(-7) Torr O-
2 the rate of sulfur removal from the surface was decreased significantly.
The decrease in this rate of sulfur removal can be linked to several factor
s, including the temperature-enhanced diffusion of sulfur to the surface an
d the temperature-enhanced diffusion of oxygen into the bulk. By varying th
e pressure of oxygen and the temperature of the substrate and by monitoring
the surface with AES we were able to identify the significant factors. A k
inetic model for the two surface species is discussed and fit to the experi
mental results. This kinetic model includes physical parameters for such th
ings as the activation energy for the sulfur diffusion to the surface as we
ll as sticking coefficients for oxygen on the surface. Through this model t
he relevant factors for the decrease in the rate of sulfur removal are exam
ined.