Atomic flux divergence in bamboo line for predicting initial formation of voids and hillocks

A calculation method of the atomic flux divergence due to electromigration, AFD(gen), has been proposed considering two-dimensional distributions of c urrent density and temperature and also simply considering the line structu re of not only polycrystalline line but also bamboo line. The validity of A FD(gen) for bamboo lines has been verified in comparison of void formation calculated by using AFD(gen) with experimental results, and it has been sho wn that void formation in bamboo line is able to be predicted by using AFD( gen). In this study, angled bamboo lines are treated for prediction of hill ock formation, and hillock formation predicted by using AFD(gen) is compare d with that measured in experiment. In addition to the verification of void prediction, the usefulness of the prediction method for electromigration d amage using AFD(gen) is discussed in more detail. (C) 2000 Elsevier Science Ltd. All rights reserved.