One- and two-dimensional position sensitive detectors based on an ITO-
pSi structure have been fabricated and studied. The experimentally mea
sured linear dependence between the photovoltage response and the ligh
t spot position is explained by a model in which the electric held in
silicon in the lateral direction (E-Si) is assumed to be constant. It
has been shown that E-Si is inversely proportional to the electron dif
fusion length. Using the experimental data the electron diffusion leng
th is estimated to be about 1 cm.