An integrated thin-film thermo-optic waveguide beam deflector

We have demonstrated the operation of a thin-film thermo-optical beam defle ctor in a three-layer optical planar waveguide. The fabricated waveguide be am deflector consists of a thin-film SiO2 bottom cladding layer, a thin-fil m polymer top cladding layer, and alternatively positioned thin-film polyme r and silica microprisms as the guiding layer. The beam deflection is achie ved through the thermo-optic effect that results in opposed index changes i n polymer and silica with respect to temperature changes. The measured defl ection sensitivity is 0.06 degrees/degrees C, for the fabricated device wit h a 7.0 mm interaction length at the wavelength of 632.8 nm. (C) 2000 Ameri can Institute of Physics. [S0003-6951(00)00916-5].