Hybrid packaging techniques, in which the device substrate is different fro
m the package substrate, and wire bonding or solder interconnections are us
ed, are inadequate for ultrahigh-speed (>100 GHz) wideband applications. By
employing wafer-bonding techniques, integrated packaging (IP) technology w
as developed, in which devices are fabricated directly on the package subst
rate, and the interconnections are made as a part of the device fabrication
process. This IP process was used to fabricate uni-traveling-carrier photo
diodes (UTC-PD's) integrated with millimeter-wave coplanar waveguides (CPW)
on package compatible sapphire with high yield. The performance of wafer-b
onded UTC-PD's with 3-dB bandwidth of 102 GHz was similar to that of conven
tional devices, and the CPW's exhibited low dispersion.