Fabrication and testing of surface micromachined polycrystalline SiC micromotors

This letter presents the fabrication and testing of surface micromachined p olycrystalline silicon carbide micromotors, A new multilayer fabrication pr ocess utilizing low temperature deposition and micromolding techniques was developed to create the desired SiC structural components. Typical operatin g voltages of salient-pole and wobble micromotors in room air were 100 and 80 V, respectively. Wobble micromotors were tested at room temperature in a tmospheres of argon, nitrogen, oxygen, and room air (25% humidity). The gea r ratio as a function of applied voltage was higher for operation in room a ir as compared with the other gases, suggesting a relationship between gear ratio and relative humidity. In addition, micromotors were tested at eleva ted temperatures and exhibited stable operation up to 500 degrees C.