Corner parisitics-free low-cost trench isolation (vol 20, pg 563, 1999)

Schwalke, U Gabric, Z Elbel, N Bothe, K Hadawi, D Janssen, I Schon, P Inioutis, A Klose, R Plagmann, J

U. Schwalke et al., Corner parisitics-free low-cost trench isolation (vol 20, pg 563, 1999), IEEE ELEC D, 21(4), 2000, pp. 187-187

1

Eletrical & Eletronics Engineeing

IEEE ELECTRON DEVICE LETTERS

07413106 → ACNP

21

4

2000

187 - 187

ISI

0741-3106(200004)21:4<187:CPLTI(>2.0.ZU;2-D