LOW-PRESSURE PLASMA POLYMER MODIFICATION FROM THE FTIR POINT-OF-VIEW

The main scope of this article was to demonstrate the potential of Fou rier transform infrared (FTIR) spectroscopy as a diagnostic tool for l ow-pressure plasma polymer modification. Two model polymers, polyethyl ene and polystyrene, were treated in radio-frequency(rf) discharges in argon, hydrogen, oxygen, nitrogen, and tetrafluoromethane. In situ FT IR analysis was based on infrared reflection absorption spectroscopy ( IRRAS) and attenuated total reflection (ATR). For both techniques, thi n-film samples were prepared from polymer solution. The effects appear ing in the infrared spectra are discussed. The results are compared wi th those from other diagnostic techniques. (C) 1997 John Wiley & Sons, Inc.