Some peculiarities of fracture of nanocrystalline nitride and boride films

Authors
Andrievski, RA Kalinnikov, GV Jauberteau, J Bates, J
Citation
Ra. Andrievski et al., Some peculiarities of fracture of nanocrystalline nitride and boride films, J MATER SCI, 35(11), 2000, pp. 2799-2806
Citations number
22
Categorie Soggetti
Apllied Physucs/Condensed Matter/Materiales Science","Material Science & Engineering
Journal title
JOURNAL OF MATERIALS SCIENCE
ISSN journal
00222461 → ACNP
Volume
35
Issue
11
Year of publication
2000
Pages
2799 - 2806
Database
ISI
SICI code
0022-2461(200006)35:11<2799:SPOFON>2.0.ZU;2-7
Abstract
Fracture surfaces including those through indentations on different nanocry stalline boride/nitride films were investigated by FE-SEM, conventional SEM , and AFM. TiB2, TiN, Ti(B,N), AlN, and (Ti,Al)N films have been obtained b y non-reactive r.f. magnetron sputtering. Deformation was realized by cleav age fracture and under a Vickers indentor. Two types of film fracture conne cted with homogeneous and inhomogeneous deformation are described and discu ssed. The analogy between the inhomogeneous deformation films image and the river pattern in the case of conventional ceramics is also pointed out. (C ) 2000 Kluwer Academic Publishers.