Stress analysis of B doped silicon bridges and cantilever structures by Raman spectroscopy

Authors
Lourenco, MA Gardiner, DJ Bowden, M Hedley, J Wood, D
Citation
Ma. Lourenco et al., Stress analysis of B doped silicon bridges and cantilever structures by Raman spectroscopy, J MAT SCI L, 19(9), 2000, pp. 767-769
Citations number
6
Categorie Soggetti
Apllied Physucs/Condensed Matter/Materiales Science","Material Science & Engineering
Journal title
JOURNAL OF MATERIALS SCIENCE LETTERS
ISSN journal
02618028 → ACNP
Volume
19
Issue
9
Year of publication
2000
Pages
767 - 769
Database
ISI
SICI code
0261-8028(200005)19:9<767:SAOBDS>2.0.ZU;2-Q