Formation of titanium nitride layers from a gaseous phase with the participation of a chemical reaction: contribution of the temperature deposition

Authors
Michalski, J
Citation
J. Michalski, Formation of titanium nitride layers from a gaseous phase with the participation of a chemical reaction: contribution of the temperature deposition, J MAT SCI L, 19(8), 2000, pp. 639-640
Citations number
4
Categorie Soggetti
Apllied Physucs/Condensed Matter/Materiales Science","Material Science & Engineering
Journal title
JOURNAL OF MATERIALS SCIENCE LETTERS
ISSN journal
02618028 → ACNP
Volume
19
Issue
8
Year of publication
2000
Pages
639 - 640
Database
ISI
SICI code
0261-8028(200004)19:8<639:FOTNLF>2.0.ZU;2-#