Two-level fluctuations (random telegraph noise) of transverse hopping curre
nt have been investigated in mesoscopic nanostructures fabricated on a subm
icrometer area of a thin amorphous silicon layer. An electric field and lig
ht-induced change of the system lifetimes in the high and low conductive st
ates is observed. The results are explained by formation and annealing of m
etastable defects in the atomic two-level hydrogen-related systems.